This book is meant to introduce piezoelectric microelectromechanical system (MEMS)
resonators to a broad audience of engineers, graduate students, and researchers with the …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

Over the past two decades, several advances have been made in micromachined sensors
and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a …

Due to their high Q and temperature-stable properties, quartz crystal oscillators are
important clock sources in consumer, commercial, industrial, and military products for many …

Recent demand in wireless communication for miniatur ized, low-power, low-cost, on-chip
and high-Q resonators to be employed in front-end RF filters or as frequency references has …

This paper reports on the design, fabrication, and characterization of piezoelectrically-
transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk …

Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or
microspeakers have been rapidly developed during the past decade to meet the …