Piezoelectric micromachined modal gyroscope (PMMG) is a novel kind of rotating rate
sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric …

Piezoelectric micromachined modal gyroscope is a solid state inertial sensor, which uses a
special mode of PZT block as the reference mode of the gyroscope conventionally. In the …

This paper presents a new method for vibratory gyroscopes. A novel special vibration is
presented, and when it is taken as a reference vibration, the device can sense two-axis …

A novel kind of MEMS micro-gyroscope, piezoelectric micromachined modal gyroscope
(PMMG), is introduced in the paper. PMMG works with the special vibratory mode of solid …

Piezoelectric solid-state micro gyroscope is a novel kind of rotating rate sensor, which is
based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with …

The objective of this paper is to present a velocity-controlled vibratory MEMS gyroscope that
achieves consistent output characteristics in the lateral driving dynamics of the system …

A novel dual-mass resonant output micromechanical gyroscope is proposed which utilizes
resonant sensing as the basis for Coriolis force detection instead of displacement sensing. It …

Many researches have been carried out on the dynamic characteristics of vibratory
microgyroscope, but only a few have been carried out on the non-ideal behaviors observed …

The detection capacitance analysis method based on the elastic body model for the tuning
fork vibratory micromachined gyroscope is first put forward to improve the analytical …

This paper presents the modeling of the detection capacitance analysis for a tuning fork
vibratory microgyroscope fabricated by the bulk silicon micromachining technology. The …