Scanning probe microscopy for testing ultrafast electronic devices

AS Hou, BA Nechay, F Ho, DM Bloom - Optical and quantum electronics, 1996 - Springer
Scanning force microscopy has been developed as a practical, non-contact probing
technique for measuring voltage waveforms at internal nodes of integrated devices and …

Voltage-contrast scanning probe microscopy

DM Bloom - Microelectronic Engineering, 1994 - Elsevier
A scanning force microscope for measuring ultrafast voltage signals is demonstrated. The
new technique is based on mixing due to the square-law force interaction present between …

Applications of an atomic force microscope voltage probe with ultrafast time resolution

BA Nechay, F Ho, AS Hou… - Journal of Vacuum …, 1995 - ui.adsabs.harvard.edu
Although scanning probe microscopy is traditionally limited to slow temporal response,
techniques utilizing nonlinear tip-to-sample interactions can be used to capture very fast …

Scanning-force-microscope test system for device internal test with high spatial and temporal resolution

C Böhm, C Roths, E Kubalek - Microelectronic Engineering, 1994 - Elsevier
A new device internal test technique is introduced based on a scanning force microscope
enabling the electrical characterization of integrated circuits with both high spatial and …

Quantitative voltage measurement of high-frequency internal integrated circuit signals by scanning probe microscopy

Z Weng, CJ Falkingham, GE Bridges… - Journal of Vacuum …, 2002 - pubs.aip.org
This article describes a scanning probe microscopy technique for quantitative high-speed
voltage wave form measurement inside an operating integrated circuit. Internal signals are …

Sampled waveform measurement in integrated circuits using heterodyne electrostatic force microscopy

GE Bridges, RA Said, M Mittal… - Review of scientific …, 1994 - pubs.aip.org
A high-resolution noncontact scanned probe technique has been developed for sampling
the internal signals of an operating integrated circuit. The signal waveform is extracted by …

Picosecond electrical sampling using a scanning force microscope

AS Hou, F Ho, DM Bloom - Electronics Letters, 1992 - opg.optica.org
Picosecond Electrical Sampling Using a Scanning Force Microscope Page 1 Abstract
Picosecond Electrical Sampling Using a Scanning Force Microscope A. S. Hou, F. Ho, and D …

High-speed integrated circuit probing using a scanning force microscope sampler

F Ho, AS Hou, DM Bloom - Electronics Letters, 1994 - ui.adsabs.harvard.edu
Using a scanning force microscope as a high-speed all-electrical sampler, the authors have
probed voltages on internal nodes of integrated circuits. The authors have demonstrated …

Heterodyne electrostatic force microscopy for non-contact high frequency integrated circuit measurement

GE Bridges, RA Said, DJ Thompson - Electronics Letters, 1993 - infona.pl
A high-resolution non-contact scanned probe potential measurement technique for
integrated circuits is presented. Local potentials are extracted by sensing the electrostatic …

[引用][C] Voltage contrast in submicron integrated circuits by scanning force microscopy

C Böhm, J Sprengepiel, M Otterbeck… - Journal of Vacuum …, 1996 - pubs.aip.org
A scanning force microscope can be used to measure a device's internal electrical potential
with high spatial and temporal resolution. We present experimental results taken with a …