This paper presents the use of our approach to comprehensive measurements of the quality
factor (Q) of 1-MHz microelectromechanical system (MEMS) tuning fork resonators. We …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

We present a Lamé mode resonator whose limiting damping mechanism depends on its
anchor geometry. The device is anchor-limited when the anchors are stiffer and is Akhiezer …

In microelectromechanical systems resonators, dissipation of energy through anchor points
into the substrate adds to resonator energy loss, contributing to low values of Q. A design for …

We present new experimental data illustrating the importance of thermoelastic damping
(TED) in MEMS resonant sensors. MEMS gyroscopes have been used to demonstrate that …

This paper presents two approaches to analyzing and calculating thermoelastic damping in
micromechanical resonators. The first approach solves the fully coupled thermomechanical …

In this paper, a semi-analytical model is derived to calculate the anchor loss of TPoS
resonators operating in higher-order length extensional modes. This model provides …

Microelectromechanical systems (MEMS) resonators typically exhibit large parasitic
feedthrough where the input drive signal is directly coupled to the output ports, presenting a …

Damping in MEMS resonators was studied experimentally and numerically. Quality factor
measurements were performed on Draper gyroscopes made from boron doped silicon …

This research examines the energy loss in micromechanical resonators fabricated in a
CMOS-MEMS process. Characterization and understanding of energy loss is a first step to …