This paper describes the design and fabrication techniques of micro capillary columns as
the main components in a microengineered gas chromatography system. The system is to …

Through the use of silicon micromachining, micron dimensional features have been
photolithographically patterned and subsequently etched and bonded to generate three …

The silicon-glass micromachined capillary column, dosing (sampling) valves and mass flow-
meter for gas chromatograph are presented. The test structures have been fabricated and …

A miniature gas chromatography (GC) system has been designed, fabricated and developed
using modem silicon micromachining and VLSI circuit processing techniques. The GC …

This paper presents the theory, fabrication, and experimental results for a microfabricated
gas chromatography column capable of performing multi-component separations using air …

A novel concept for small volume liquid chromatography is presented. Using
micromachining techniques, a planar silicon structure containing the channel system has …

A small column (micro-column) has been fabricated on-chip that can contribute to
development of a miniature gas Chromatograph for mobile and multi-point atmospheric …

A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching
and ultrasonic machining. The micro-column which was formed on silicon substrate was …

This paper describes different approaches to achieve high-performance microfabricated
silicon-glass separation columns for microgas chromatography systems. The capillary width …

Capillary liquid chromatography columns suitable for microchemical analysis have been
fabricated on planar glass and silicon wafers, using standard microengineering techniques …