UHF micromechanical extensional wine-glass mode ring resonators
Y Xie, SS Li, YW Lin, Z Ren… - … Devices Meeting 2003, 2003 - ieeexplore.ieee.org
Vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-
glass mode shape to achieve lower impedance than previous UHF resonators, have been …
glass mode shape to achieve lower impedance than previous UHF resonators, have been …
1.52-GHz micromechanical extensional wine-glass mode ring resonators
Y Xie, SS Li, YW Lin, Z Ren… - ieee transactions on …, 2008 - ieeexplore.ieee.org
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …
UHF micromechanical compound-(2, 4) mode ring resonators with solid-gap transducers
LW Hung, CTC Nguyen, Y Xie, YW Lin… - … Symposium Joint with …, 2007 - ieeexplore.ieee.org
UHF vibrating micromechanical ring resonators with solid-filled dielectric transducer gaps
(as opposed to previous air gaps) operating in a compound-(2, 4) mode have been …
(as opposed to previous air gaps) operating in a compound-(2, 4) mode have been …
Micromechanical" hollow-disk" ring resonators
SS Li, YW Lin, Y Xie, Z Ren… - 17th IEEE International …, 2004 - ieeexplore.ieee.org
A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …
High- UHF Spoke-Supported Ring Resonators
A vibrating micromechanical spoke-supported ring resonator employing a central peg-
anchor, balanced non-intrusive quarter-wavelength extensional support beams, and …
anchor, balanced non-intrusive quarter-wavelength extensional support beams, and …
Frequency-selective MEMS for miniaturized communication devices
CTC Nguyen - 1998 IEEE Aerospace Conference Proceedings …, 1998 - ieeexplore.ieee.org
With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as IC-compatible tanks for use in the low phase noise oscillators and highly …
proposed as IC-compatible tanks for use in the low phase noise oscillators and highly …
Frequency-selective MEMS for miniaturized low-power communication devices
CTC Nguyen - IEEE Transactions on Microwave Theory and …, 1999 - ieeexplore.ieee.org
With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …
High-Q UHF micromechanical radial-contour mode disk resonators
JR Clark, WT Hsu, MA Abdelmoneum… - Journal of …, 2005 - ieeexplore.ieee.org
A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …
High-Q micromechanical oscillators and filters for communications
CTC Nguyen - 1997 IEEE International Symposium on Circuits …, 1997 - ieeexplore.ieee.org
With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as IC-compatible tanks for use in the low phase noise oscillators and highly …
proposed as IC-compatible tanks for use in the low phase noise oscillators and highly …
Micromechanical filters for miniaturized low-power communications
CTC Nguyen - Smart Structures and Materials 1999: Smart …, 1999 - spiedigitallibrary.org
With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as IC-compatible tanks for use in the highly selective filters of communications …
proposed as IC-compatible tanks for use in the highly selective filters of communications …