In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

This paper reports on the recent progress of the high-Q integrated micromechanical
resonator, oscillator, and filter using the “CMOS-MEMS technology” to enable monolithic …

Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18-μm-1-
poly-6-metal foundry CMOS technology have been demonstrated for the first time to …

Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …

A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …

Integrated CMOS-MEMS clamped-clamped beam resonators using metal wet etching
technique are demonstrated with passive temperature compensation through the use of SiO …

This work reports the design of a monolithic oscillator based on a low motional impedance
(R m) CMOS-MEMS resonator array with a high-stiffness driving scheme in a standard 0.35 …

This paper demonstrates the feasibility of a novel fabrication approach of MEMS resonators
above standard CMOS circuitry and with zero-level vacuum package. As a proof of concept …

A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …