This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an
optical output and operates in a resonant condition. A custom fabrication technology, based …

This work focuses on a Micro-Opto-Electro-Mechanical (MOEM) vibratory gyroscope which
operates in resonant condition. A custom technology performed through the adoption of a …

Micro-electromechanical systems (MEMS) technologies allow the reduction of mass and
manufacture of gyroscopes, which demonstrate the features of small volume, low …

In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS)
gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS …

In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input …

This paper presents a strain gauge using the mechanical-optical coupling method. The Si-
based optical microring resonator was employed as the sensing element, which was …

A novel design of a micromachined vibrating rate gyroscope is presented. The rate
gyroscope consists of a suspended proof mass which is attached by indium bumps to a …

In this article, a two-dimensional (2-D) tunable photonic crystal wavelength-modulated micro-
opto-electro-mechanical system (MOEMS) gyroscope is reported. The device consists of a …