The increasing popularity and capability of X-ray tomography to image cracks and damage
in three dimensions in a non destructive fashion brings forward a new way to validate large …

X-ray microscopy (XRM) offers long working distances and switchable magnification,
facilitating time-resolved volumetric investigation of materials and structures. Examples …

X-ray microscopy (XRM) has emerged as a powerful technique that reveals 3D images and
quantitative information of interior structures. XRM executed both in the laboratory and at the …

This letter describes a strategy for controlling fracture in microelectromechanical systems
(MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with …

Millions of micro electro mechanical system sensors are fabricated each year using an ultra-
clean process that allows for a vacuum-encapsulated cavity. These devices have a multi …

Nanowires have significant potential in future technologies such as nanomechanical
devices and electronics. Recent experiments suggest that nanowires with sub-100 nm …

X-ray microtomography (XMT) has been utilized for observing deformation, damage and
fracture behaviors in structural materials. In-situ observation using XMT provides a unique …

We describe our recent work on developing X-ray diffraction microscopy as a tool for
studying three dimensional microstructure dynamics. This is a measurement technique that …

The field of micro-/nano-mechanics of materials has been driven, on the one hand by the
development of ever smaller structures in devices, and, on the other, by the need to map …

High-resolution imaging of Cu/low-k on-chip interconnect stacks in advanced
microelectronic products is demonstrated using full-field transmission X-ray microscopy …