X-ray microbeam strain investigation on Cu–MEMS structures

O Perroud, R Vayrette, C Rivero, O Thomas… - Microelectronic …, 2010 - Elsevier
The mechanical properties of simple metals in small dimensions have been the objects of
many studies. Average stress measurements clearly show that yield stress increases …

[HTML][HTML] Fracture mechanics of micro samples: Fundamental considerations

R Pippan, S Wurster, D Kiener - Materials & Design, 2018 - Elsevier
In this review article we consider the crack growth resistance of micrometer and sub-
micrometer sized samples from the fracture mechanics point of view. Standard fracture …

Using confocal microscopy and digital image correlation to measure local strains around a chip corner and a crack front

Y Yang, PM Souare, J Sylvestre - IEEE Transactions on Device …, 2019 - ieeexplore.ieee.org
In a flip chip package, the chip corner areas which are embedded in the underfill material
are often critical to the damage initiation, since a stress concentration usually exists at these …

[PDF][PDF] Brittle fracture studied by ultra-high-speed synchrotron X-ray diffraction imaging

A Petit, S Pokam, F Mazen, S Tardif… - Journal of Applied …, 2022 - journals.iucr.org
In situ investigations of cracks propagating at up to 2.5 km s− 1 along an (001) plane of a
silicon single crystal are reported, using X-ray diffraction megahertz imaging with intense …

Microfabrication Using X-Ray Lithography

DW Tolfree, MJ Jackson - Microfabrication and Nanomanufacturing, 2 - books.google.com
During the past decade, there has been a rapid development in microfabrication technology
driven by the market need for low-cost consumer products, such as portable …

Effect of aqueous solution chemistry on the accelerated cracking of lithographically patterned arrays of copper and nanoporous thin-films

EP Guyer, RH Dauskardt - MRS Online Proceedings Library (OPL), 2004 - cambridge.org
The effect of moisture and aqueous solution chemistry on the rate of crack growth in
lithographically patterned arrays of copper and low dielectric constant (LKD) materials is …

[HTML][HTML] Three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam

A Yoneyama, K Ishiji, A Sakaki, Y Kobayashi… - Scientific Reports, 2023 - nature.com
X-ray topography is a powerful method for analyzing crystal defects and strain in crystalline
materials non-destructively. However, conventional X-ray topography uses simple X-ray …

Influence of nanometre‐sized notch and water on the fracture behaviour of single crystal silicon microelements

K Minoshima*, T Terada… - Fatigue & Fracture of …, 2000 - Wiley Online Library
The influence of a notch and a water environment on the quasi‐static and fatigue fracture
behaviour was investigated in single crystal silicon microelements. The tests were …

Evaluation of microfracture toughness and microcracking with notch tip radius of Si film structure for microactuator in hard disk drives

SH Lee, JS Kim, JW Evans, D Son, YE Pak… - Microsystem …, 2001 - Springer
The technologies developed for macroscale testing are not necessarily applicable to
evaluate the mechanical properties of structures with dimensions comparable to those of …

Evolution of anisotropic crack patterns in shrinking material layers

R Szatmári, Z Halász, A Nakahara, S Kitsunezaki… - Soft Matter, 2021 - pubs.rsc.org
Anisotropic crack patterns emerging in desiccating layers of pastes on a substrate can be
exploited for controlled cracking with potential applications in microelectronic manufacturing …