Piezoelectric MEMS vibrational energy harvesters: Advances and outlook
MT Todaro, F Guido, V Mastronardi, D Desmaele… - Microelectronic …, 2017 - Elsevier
Piezoelectric MEMS energy harvesters based on thin films are compact and cost-effective
microgenerators for scavenging environmental vibrations. This technology is promising for …
microgenerators for scavenging environmental vibrations. This technology is promising for …
Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting …
KA Cook-Chennault, N Thambi… - Smart materials and …, 2008 - iopscience.iop.org
Power consumption is forecast by the International Technology Roadmap of
Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor …
Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor …
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
D Isarakorn, D Briand, P Janphuang… - Smart Materials and …, 2011 - iopscience.iop.org
This paper focuses on the fabrication and evaluation of vibration energy harvesting devices
by utilizing an epitaxial Pb (Zr 0.2 Ti 0.8) O 3 (PZT) thin film. The high quality of the c-axis …
by utilizing an epitaxial Pb (Zr 0.2 Ti 0.8) O 3 (PZT) thin film. The high quality of the c-axis …
Energy harvesting MEMS device based on thin film piezoelectric cantilevers
WJ Choi, Y Jeon, JH Jeong, R Sood, SG Kim - Journal of Electroceramics, 2006 - Springer
A thin film lead zirconate titanate Pb (Zr, Ti) O 3 (PZT), energy harvesting MEMS device is
developed to enable self-supportive sensors for in-service integrity monitoring of large social …
developed to enable self-supportive sensors for in-service integrity monitoring of large social …
[HTML][HTML] A review on piezoelectric energy harvesting: materials, methods, and circuits
Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing
next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly …
next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly …
[HTML][HTML] MEMS-based energy harvesting devices for low-power applications–a review
Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power
H Liu, CJ Tay, C Quan, T Kobayashi… - Journal of …, 2011 - ieeexplore.ieee.org
A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide
operation bandwidth was designed, microfabricated, and characterized. The MEMS …
operation bandwidth was designed, microfabricated, and characterized. The MEMS …
Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading
R Andosca, TG McDonald, V Genova… - Sensors and Actuators A …, 2012 - Elsevier
Experimental and theoretical investigations on micro-scale multi-morph cantilever
piezoelectric vibrational energy harvesters (PZEHs) of the MicroElectroMechanical Systems …
piezoelectric vibrational energy harvesters (PZEHs) of the MicroElectroMechanical Systems …
Ultra-low resonant piezoelectric MEMS energy harvester with high power density
We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance
frequency and high power density. A spiral shaped microelectromechanical system (MEMS) …
frequency and high power density. A spiral shaped microelectromechanical system (MEMS) …