A method for fabricating a magnetic tunnel junction (MTJ) device includes creating a recess
within a second patterning layer, in which a first patterning layer overhangs the recessed …

A method of forming a magnetic tunnel junction (MTJ) device includes forming a spacer on
an exposed side portion of the MTJ device. The method further includes forming an etch …

A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …

A method of forming a magnetic tunnel junction device is disclosed that includes forming a
trench in a substrate, the trench including a first sidewall, a second sidewall, a third sidewall …

A magnetic tunnel junction (MTJ) device is formed by a process that includes forming a
trench in a substrate and depositing an MTJ structure within the trench. The MTJ structure …

A multi-step etch technique for fabricating a magnetic tunnel junction (MTJ) apparatus
includes forming a first conductive hard mask on a first electrode of the MTJ apparatus for …

(57) ABSTRACT A method of manufacturing a magnetic tunnel junction device is disclosed
that includes forming a trench in a Sub strate, depositing a conductive terminal within the …

An improved magnetic tunnel junction device and methods for fabricating the improved
magnetic tunnel junction device are provided. The provided two-etch process reduces …

(57) ABSTRACT A method of fabricating a magnetic tunnel junction (MTJ) device is
provided. A patterned hard mask is oxidized to form a Surface oxide thereon. An MTJ Stack …

US9142762B1 - Magnetic tunnel junction and method for fabricating a magnetic tunnel junction
- Google Patents US9142762B1 - Magnetic tunnel junction and method for fabricating a …