Micro/nano structures have unique optical, electrical, magnetic, and thermal properties.
Studies on the preparation of micro/nano structures are of considerable research value and …

Laser-based materials processing techniques are gaining widespread use in micro-
manufacturing applications. The use of laser microfabrication techniques enables the …

Photolithography is one of the most commonly used techniques in semiconductor
manufacturing, which is the foundation for all the modern electronic device fabrication …

With the rapid development in advanced industries, such as microelectronics and optics
sectors, the functional feature size of devises/components has been decreasing from micro …

Laser machining is an emerging area with a wide variety of applications, ranging from bulk
machining in metal forming to micromachining and microstructuring in electronics and …

This paper provides an overview of advances in laser based nano-manufacturing
technologies including surface nano-structure manufacturing, production of nano materials …

A brief review is focused on laser micromachining of materials. Micromachining of materials
is highly widespread method used in many industries, including semiconductors, electronic …

Laser precision engineering is being extensively applied in industries for device
microfabrication due to its unique advantages of being a dry and noncontact process …

Femtosecond laser micromachining has emerged in recent years as a new technique for
micro/nano structure fabrication because of its applicability to virtually all kinds of materials …

Miniaturization and high precision are rapidly becoming a requirement for many industrial
processes and products. As a result, there is greater interest in the use of laser …