A study of zinc doping in metallo‐organic chemical vapor deposition of InP

AW Nelson, LD Westbrook - Journal of applied physics, 1984 - pubs.aip.org
Over the last ten years the quality of both bulk and epitaxial InP has improved substantially
and the material is now receiving a great deal of attention as its properties are utilized in a …

Doping studies for InP grown by organometallic vapor phase epitaxy

CC Hsu, JS Yuan, RM Cohen, GB Stringfellow - Journal of crystal growth, 1986 - Elsevier
InP with doping levels as low as 8× 10 13 cm-3 and 300 K mobilities as high as 5744 cm
2/V· s has been grown without intentional doping, using trimethylindium (TMIn) and …

p‐type doping of InP and Ga0. 47In0. 53As using diethylzinc during metalorganic molecular beam epitaxy

RA Hamm, D Ritter, H Temkin, MB Panish… - Applied physics …, 1991 - pubs.aip.org
Diethylzinc (DEZnl was used. as a p-type dopant source during metalorganic molecular
beam epitaxy of G~. &x~.~~ As and InP. The incorporation efficiency of the Zn was less than …

Zinc incorporation into InP grown by atmospheric pressure metalorganic vapor phase epitaxy

RA Logan, SNG Chu, M Geva, NT Ha… - Journal of applied …, 1996 - pubs.aip.org
The acceptor Zn is widely used as a p-type dopant in device formation in metalorganic vapor
phase epitaxy MOVPE in the InP/InGaAsP material system. Zn has a high solubility1, 2 …

High concentration Zn doping in InP grown by low‐pressure metalorganic chemical vapor deposition

S Chichibu, M Kushibe, K Eguchi, M Funemizu… - Journal of applied …, 1990 - pubs.aip.org
High concentration Zn doping in InP grown by low‐pressure metalorganic chemical vapor
deposition (MOCVD) was investigated in terms of saturated Zn and hole concentrations. A …

Vapor phase epitaxial growth and characterization of InP on GaAs

SJJ Teng, JM Ballingall, FJ Rosenbaum - Applied physics letters, 1986 - pubs.aip.org
Crystal growth of InP on GaAs by vapor phase epitaxy is reported. It is demonstrated that
good quality InP epitaxial layers with featureless surface morphology can be grown on GaAs …

Doping studies of Ga0.5In0.5P organometallic vapor‐phase epitaxy

CC Hsu, JS Yuan, RM Cohen… - Journal of applied …, 1986 - pubs.aip.org
Undoped Ga0. 5In0. 5P has been successfully grown by organometallic vapor‐phase
epitaxy on GaAs substrates with a free‐electron concentration of 1016 cm− 3 and a mobility …

LP-MOCVD growth, characterization, and application of InP material

M Razeghi - Semiconductors and Semimetals, 1990 - Elsevier
Publisher Summary This chapter describes the recent progress made on the growth,
characterization, and application of indium phosphide (InP) and related compounds grown …

Zinc doping in InP grown by atmospheric pressure metalorganic vapor phase epitaxy

A Molassioti, F Scholz, Y Gao - Journal of crystal growth, 1990 - Elsevier
Doping experiments with zinc (Zn) in metalorganic vapor phase epitaxial (MOVPE) indium
phosphide (InP) layers have been performed in the carrier concentration range 1× 10 17< …

Low‐pressure metalorganic chemical vapor deposition growth and characterization of δ‐doped InP

MA di Forte‐Poisson, C Brylinski, E Blondeau… - Journal of applied …, 1989 - pubs.aip.org
This work describes the low-pressure metalorganic chemical vapor deposition growth of
planar-doped InP epilayers using Si donors. Capacitance-voltage measurements and …