RF MEMS-CMOS device integration: An overview of the potential for RF researchers
RR Mansour - IEEE Microwave Magazine, 2013 - ieeexplore.ieee.org
Over the past decades, a great deal of progress has been made in the development of
semiconductor manufacturing processes. This in turn has made possible the monolithic …
semiconductor manufacturing processes. This in turn has made possible the monolithic …
Flip-chip assembly for Si-based RF MEMS
KF Harsh, W Zhang, VM Bright… - Technical Digest. IEEE …, 1999 - ieeexplore.ieee.org
MEMS-based RF components are being developed for various microwave and millimeter-
wave applications. However, most RF MEMS have to be fabricated using GaAs, ceramics …
wave applications. However, most RF MEMS have to be fabricated using GaAs, ceramics …
[PDF][PDF] MEMS for RF/microwave wireless applications: the next wave
RJ Richards, HJ De Los Santos - Microwave Journal, 2001 - nanomems-research.com
Microelectromechanical systems (MEMS) technology is on the verge of revolutionizing RF
and microwave applications. 1 The requirements of present day and future RF/microwave …
and microwave applications. 1 The requirements of present day and future RF/microwave …
MEMS and Si micromachined circuits for high-frequency applications
LPB Katehi, JF Harvey, E Brown - IEEE Transactions on …, 2002 - ieeexplore.ieee.org
RF micromachining and microelectromechanical structure (MEMS) technology promise to
provide an innovative approach in the development of effective and low-cost circuits and …
provide an innovative approach in the development of effective and low-cost circuits and …
Microwave MEMS technology for next-generation wireless communications
LE Larson - 1999 IEEE MTT-S International Microwave …, 1999 - ieeexplore.ieee.org
The use of MEMS technology for microwave applications promises to solve some of the most
vexing problems still confronting the field of high-frequency technology for wireless …
vexing problems still confronting the field of high-frequency technology for wireless …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
[图书][B] RF MEMS and their applications
VK Varadan, KJ Vinoy, KA Jose - 2003 - books.google.com
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and
actuators, which can react to environmental change under micro-circuit control. The …
actuators, which can react to environmental change under micro-circuit control. The …
RF MEMS from a device perspective
JJ Yao - Journal of micromechanics and microengineering, 2000 - iopscience.iop.org
This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
[图书][B] RF MEMS circuit design for wireless communications
HJ De Los Santos - 2002 - books.google.com
This is the first comprehensive book to address the design of RF MEMS-based circuits for
use in high performance wireless systems. A groundbreaking research and reference tool …
use in high performance wireless systems. A groundbreaking research and reference tool …
Modeling rf mems devices
K Van Caekenberghe - IEEE Microwave Magazine, 2012 - ieeexplore.ieee.org
The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …