MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
A review of MEMS oscillators for frequency reference and timing applications
JTM Van Beek, R Puers - Journal of Micromechanics and …, 2011 - iopscience.iop.org
MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …
timing devices that can rival the electrical performance of well-established quartz-based …
Microelectromechanical resonators for radio frequency communication applications
J Basu, TK Bhattacharyya - Microsystem technologies, 2011 - Springer
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …
have shown significant potential for sensing and high frequency signal processing …
MEMS oscillators for high volume commercial applications
M Lutz, A Partridge, P Gupta, N Buchan… - … Solid-State Sensors …, 2007 - ieeexplore.ieee.org
Microelectromechanical Systems (MEMS) resonators have been investigated for over forty
years but have never delivered the high performance and low cost required of commercial …
years but have never delivered the high performance and low cost required of commercial …
Temperature dependence of quality factor in MEMS resonators
The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …
RF MEMS from a device perspective
JJ Yao - Journal of micromechanics and microengineering, 2000 - iopscience.iop.org
This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
MEMS technology for timing and frequency control
CTC Nguyen - IEEE transactions on ultrasonics, ferroelectrics …, 2007 - ieeexplore.ieee.org
An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …
and frequency control is presented. In particular, micromechanical RF filters and reference …
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
commercial CMOS technologies is discussed. A figure of merit to study the performance of …
MEMS resonators that are robust to process-induced feature width variations
A stability analysis and design method for MEMS resonators is presented. The frequency
characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on …
characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on …
[图书][B] Fabrication and design of resonant microdevices
B Bahreyni - 2008 - books.google.com
This book discusses the main issues of fabrication and design, and applications of
micromachined resonant devices, including techniques commonly used for processing the …
micromachined resonant devices, including techniques commonly used for processing the …