Acoustic resonators, such as thin-film solidly mounted resonators (SMRs) and silicon
microelectromechanical systems have been used widely in commercial and research RF …

Frequency sources and high quality filters based on mechanical resonators are essential
building blocks for communication systems as well as analog and digital electronics. Driven …

On-chip integrability of high-Q RF passives alongside CMOS transistors is crucial for the
implementation of monolithic radio transceivers. One of the most significant bottlenecks in …

We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …

This letter presents the design of a micromechanical oscillator based on a vertically coupled
(VC) CMOS-microelectromechanical systems (MEMS) resonator pair for phase noise …

A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

This paper reports on recent progress on high-Q integrated micromechanical resonators
using “CMOS-MEMS technology” to enable monolithic integration of MEMS and CMOS …

A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …

This work presents the first unreleased Silicon resonators fabricated at the transistor level of
a standard CMOS process, and realized without any release steps or packaging. These …

Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …