We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …

Highly sensitive microelectromechanical system (MEMS) resonators have been used for
extensive applications such as mass sensing. However, these arrays are prone to process …

A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

Acoustic resonators, such as thin-film solidly mounted resonators (SMRs) and silicon
microelectromechanical systems have been used widely in commercial and research RF …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …

A method for coarse and fine mechanical frequency tuning of MEMS resonators is presented
in this paper. Controlled material deposition onto microresonator top surfaces enables …

In this paper, radio frequency (RF) ultra-stiff electromechanical resonators are introduced
and compared with their ultra-light counterparts. RF ultra-stiff resonators with dimensions in …

We demonstrate dome-shaped, radio frequency, micromechanical resonators with
integrated thermo-elastic actuators. Such resonators can be used as the frequency …

A method to integrate micromechanical frequency-determining elements along with the
corresponding electromechanical transducers into a poly or single-crystal silicon film layer is …

Microelectromechanical Systems (MEMS) resonators have been investigated for over forty
years but have never delivered the high performance and low cost required of commercial …