Microelectromechanical systems (MEMS) are evolving into highly integrated technologies
for a variety of application areas. Add the biological dimension to the mix and a host of new …

The development of microelectromechanical systems (MEMS) based on micromachining
and microelectronics technologies has been significant for almost a decade. However, it is …

It is widely recognized that, in the development and production of microtransducers,
computer simulations constitute a cost-effective and time-saving alternative to the traditional …

Micro-electro-mechanical-systems (MEMS) are three-dimensional structures manufactured
through silicon micromachining technologies. They made their first appearance in …

This book systematically describes the design options for micro systems as well as the
equations needed for calculating the behavior of their basic elements. The fundamental …

Dieses Buch vereint die wesentlichen Aspekte zum erfolgreichen Entwurf von
Mikrosystemen und gibt eine geschlossene Darstellung der Grundlagen …

Die Mikrosystemtechnik unterstützt den Menschen bereits heute in vielen Bereichen des
alltäglichen Lebens; dabei ist er sich ihrer Wirkung allerdings kaum noch bewusst …

This paper gives a brief overview of microactuators, focussing on devices made by
microfabrication technologies which are based on silicon processes like photolithography …

From conception to realization, this book covers all aspects of miniaturized systems that
physically interact and manipulate objects at the microscale. It provides an understanding of …