We show by simulation that a three-terminal nanoelectromechanical (NEM) relay combined
with a feedback resistor provides a tunable transconductance Gm over an adjustable input …

Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

The technology scaling of feature sizes and supply voltages in earlier CMOS designs
enabled significant improvements in terms of density, performance, and energy efficiency …

CMOS scaling has been very successful in generating small, fast, low cost electronics.
However, in advanced CMOS nodes, the total power consumption is dominated by the static …

This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

Any polarizable body placed in an inhomogeneous electric field experiences a dielectric
force. This phenomenon is well known from the macroscopic world: a water jet is deflected …

We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port
nano-electro-mechanical (NEMS) device. One port is a very nonlinear capacitive actuation …

Abstract Nanoelectromechanical (NEM) switches,,,,, have received widespread attention as
promising candidates in the drive to surmount the physical limitations currently faced by …

We present 4-terminal (4-T) silicon (Si) nanoelectron-mechanical (NEM) relays fabricated on
silicon-on-insulator (SOI) wafers. We demonstrate true 4-T switching behavior with isolated …

We present a new generation of nano‐electromechanical systems (NEMS), which are
realized by doping the semiconductor base material. In contrast to the traditional approach …