A method for coarse and fine mechanical frequency tuning of MEMS resonators is presented
in this paper. Controlled material deposition onto microresonator top surfaces enables …

A post-fabrication process was developed to tune the frequency of a set of comb-drive
resonators by selectively adding polysilicon to their rotors. Selective deposition was …

Micro-electromechanical beam resonators and arrays are fabricated using a custom low-
temperature (< 300degC) CMOS-compatible silicon carbide micro-fabrication process. A …

Variations in micromachining processes cause submicron differences in the size of MEMS
devices, which leads to frequency scatter in resonators. A new method of compensating for …

A batch-compatible, post-fabrication annealing technique based upon filament-like heating
of microstructures is demonstrated as an effective means for trimming the resonance …

Having recently been demonstrated at frequencies up to 1.9 GHz with Q's> 10,000 and
record frequency-Q product of 2.75 times10 13 exceeding those of quartz crystals, vibrating …

This paper presents an investigation of the long-term frequency stability of wafer-scale
encapsulated silicon MEMS resonators. Two aspects of stability were examined: long-term …

A novel, fully functional silver (Ag) electrodeposition process has been integrated into
surface micromachined polysilicon resonators for the purpose of resonant frequency tuning …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …

Polysilicon/spl mu/mechanical resonators utilizing a novel temperature-dependent electrical
stiffness design technique to compensate for temperature-induced frequency shifts have …