Composition profile of an AlGaAs epilayer on a V‐grooved substrate grown by low‐pressure metalorganic vapor phase epitaxy

W Pan, H Yaguchi, K Onabe, R Ito, Y Shiraki - Applied physics letters, 1995 - pubs.aip.org
A composition distribution of an Al x Ga1− x As epilayer on a V‐grooved substrate grown by
low‐pressure metalorganic vapor phase epitaxy is described. The aluminum (Al) content of …

High‐spatial‐resolution photoluminescence measurements on AlxGa1−xAs grown on a nonplanar substrate by metalorganic vapor phase epitaxy

SM Olsthoorn, MMG Bongers, LJ Giling - Applied physics letters, 1994 - pubs.aip.org
High‐spatial‐resolution photoluminescence measurements are reported of Al x Ga1− x As
grown on nonplanar substrates by metalorganic vapor phase epitaxy. The aluminum …

Molecular beam epitaxy of GaAs/AlGaAs quantum wells on channeled substrates

HP Meier, E Van Gieson, W Walter, C Harder… - Applied physics …, 1989 - pubs.aip.org
GaAs/AlGaAs quantum wells (QWs) were grown by molecular beam epitaxy on GaAs (100)
substrates patterned with ridges and grooves in the [011̄] direction. Low‐temperature …

Device‐quality epitaxial AlAs by metalorganic‐chemical vapor deposition

JJ Coleman, PD Dapkus, N Holonyak… - Applied Physics …, 1981 - pubs.aip.org
The growth and characterization of high-quality AlAs expitaxiallayers on GaAs subtrates by
metalorganic-chemical vapor deposition are described. The epitaxial layers described here …

Interfacial properties of (111) A GaAs/AlGaAs multiquantum-well structures grown by metalorganic vapor phase epitaxy

A Sanz-Hervás, S Cho, A Majerfeld, BW Kim - Applied Physics Letters, 2000 - pubs.aip.org
We present the heterointerfacial properties of GaAs/AlGaAs multiquantum-well structures
grown by atmospheric-pressure metalorganic vapor phase epitaxy on (111) A GaAs …

Growth and doping properties of AlGaAs/GaAs/InGaAs structures on nonplanar substrates for applications to low threshold lasers

H Zhao, K Uppal, MH MacDougal, PD Dapkus… - Journal of crystal …, 1994 - Elsevier
The growth behavior of AlGaAs/GaAs/InGaAs structures on non-planar (100) GaAs
substrates has been studied. The structures were grown by atmospheric pressure …

GaAs/AlGaAs quantum well lasers with active regions grown by atomic layer epitaxy

SP DenBaars, CA Beyler, A Hariz, PD Dapkus - Applied physics letters, 1987 - pubs.aip.org
Atomic layer epitaxy (ALE) is a relatively new crystal growth technique which allows control
of the growth process at the monolayer level through a self‐limiting, surface‐controlled …

Trimethylamine alane for MOVPE of AlGaAs and vertical-cavity surface-emitting laser structures

RP Schneider Jr, RP Bryan, ED Jones, RM Biefeld… - Journal of crystal …, 1992 - Elsevier
The use of trimethylamine alane (TMAAl) as an alternative to trimethylaluminum (TMAl) for
low-pressure metalorganic vapor-phase epitaxy (MOVPE) of AlGaAs thin films has been …

Influence of substrate temperature on the growth of AlGaAs/GaAs quantum well heterostructures by organometallic vapor phase epitaxy

JR Shealy, GW Wicks, H Ohno… - Japanese journal of …, 1983 - iopscience.iop.org
Abstract The growth of AlGaAs/GaAs quantum well heterostructures by organometallic vapor
phase epitaxy has been investigated over a range of substrate temperature from 500 C to …

Characterization of AlGaP/GaP heterostructures grown by MOVPE

K Adomi, N Noto, A Nakamura, T Takenaka - Journal of crystal growth, 1992 - Elsevier
Abstract High quality Al x Ga 1-x P/GaP heteroepitaxial layers were grown by a barrel-type
multiwafer metalorganic vapor phase epitaxy system. Fundamental aspects concerning the …