Magnetic tunnel junction with reduced damage

CH Diaz, RL Lee - US Patent 9,905,751, 2018 - Google Patents
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …

Magnetic tunnel junction structure

X Li - US Patent 9,029,170, 2015 - Google Patents
A magnetic tunnel junction (MTJ) device is formed by a process that includes forming a
trench in a substrate and depositing an MTJ structure within the trench. The MTJ structure …

Sub-lithographic patterning of magnetic tunneling junction devices

Y Lu - US Patent 9,362,336, 2016 - Google Patents
A method for fabricating a magnetic tunnel junction (MTJ) device includes creating a recess
within a second patterning layer, in which a first patterning layer overhangs the recessed …

Methods for manufacturing magnetic tunnel junction structure

K Tokashiki, H Kwon, M Kim - US Patent App. 13/533,385, 2013 - Google Patents
Methods for manufacturing a magnetic tunneljunction struc ture include forming a magnetic
tunnel junction (MTJ) layer by sequentially stacking a first ferromagnetic layer, a tunnel …

Method of forming a magnetic tunnel junction device

X Li - US Patent 8,680,592, 2014 - Google Patents
A method of forming a magnetic tunnel junction device is disclosed that includes forming a
trench in a substrate, the trench including a first sidewall, a second sidewall, a third sidewall …

Magnetic tunnel junction and method for fabricating a magnetic tunnel junction

X Li, K Lee, WC Chen, Y Lu, C Park… - US Patent App. 14 …, 2015 - Google Patents
An improved magnetic tunnel junction device and methods for fabricating the improved
magnetic tunnel junction device are provided. The provided two-etch process reduces …

Magnetic tunnel junction device and fabrication

X Li, SH Kang, X Zhu - US Patent 9,203,013, 2015 - Google Patents
An apparatus includes a structure that includes a bottom cap layer Surrounding a metal pad.
The apparatus also includes a magnetic tunnel junction (MTJ) device that includes a bottom …

Magnetic tunnel junction device and fabrication

X Li, SH Kang - US Patent 9,041,131, 2015 - Google Patents
A method of forming a magnetic tunnel junction (MTJ) device includes forming a first MTJ
cap layer on a MTJ structure. The first MTJ cap layer includes a first non-nitrified metal. The …

Method of forming a magnetic tunnel junction device

X Li - US Patent 8,766,384, 2014 - Google Patents
A method of forming a magnetic tunnel junction device is disclosed that includes forming a
trench in a substrate, the trench including a plurality of sidewalls and a bottom wall. The …

Self-aligned encapsulation hard mask to separate physically under-etched MTJ cells to reduce conductive R-deposition

Y Yang, D Shen, V Sundar, YJ Wang - US Patent 10,868,237, 2020 - Google Patents
A method for etching a magnetic tunneling junction (MTJ) structure is described. A MTJ stack
is deposited on a bottom electrode wherein the MTJ stack comprises at least a pinned layer …