This paper reports on the first demonstration of a 1.05-GHz microelectromechanical (MEMS)
oscillator based on lateral-field-excited (LFE) piezoelectric AlN contourmode resonators …

This paper reports on the design and experimental verification of a new class of thin-film
(250 nm) superhigh-frequency laterally-vibrating piezoelectric microelectromechanical …

This work presents higher-order contour mode piezoelectric AlN MEMS resonators with
lithographically defined GHz operating frequencies. By selectively patterning the …

This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …

This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-
semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) …

This paper reports on the design, simulation, fabrication and characterization of the first
micro-ovenized Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour-Mode …

This paper reports on the design and experimental verification of a new class of thin-film
(250 nm) super high frequency (SHF) laterally-vibrating piezoelectric …

This paper reports on the design and characterization of a high-gain tunable
transimpedance amplifier (TIA) suitable for gigahertz oscillators that use high-Q lateral …

This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482
MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the …

This paper reports on the demonstration of series tuning for lateral micromechanical
oscillators and its application for electronic temperature compensation of piezoelectric …