Recent advances in nano-opto-electro-mechanical systems

N Xu, ZD Cheng, JD Tang, XM Lv, T Li, ML Guo… - …, 2021 - degruyter.com
Nano-opto-electro-mechanical systems (NOEMS), considered as new platforms to study
electronic and mechanical freedoms in the field of nanophotonics, have gained rapid …

Nano-opto-electro-mechanical systems

L Midolo, A Schliesser, A Fiore - Nature nanotechnology, 2018 - nature.com
A new class of hybrid systems that couple optical, electrical and mechanical degrees of
freedom in nanoscale devices is under development in laboratories worldwide. These nano …

Nano‐Opto‐Electro‐Mechanical Systems for Integrated Quantum Photonics

L Midolo, C Qvotrup - Photonic Quantum Technologies …, 2023 - Wiley Online Library
This chapter covers the topic of nano‐opto‐electro‐mechanical systems (NOEMS) and their
application in quantum photonic integrated circuits. When reducing the size of optical …

A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler

T Zhang, H Wang, X Xia, N Yan, X Sha… - Light: Science & …, 2022 - nature.com
The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that
hold promises in both classical and quantum manipulations of the interplay between one or …

Room-temperature silicon platform for GHz-frequency nanoelectro-opto-mechanical systems

D Navarro-Urrios, MF Colombano, G Arregui… - ACS …, 2022 - ACS Publications
Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical,
mechanical, and optical signals on a chip to realize new functions. Most of the technology …

Review of sensing and actuation technologies–from optical MEMS and nanophotonics to photonic nanosystems

Y Ma, W Liu, X Liu, N Wang, H Zhang - International Journal of …, 2024 - Taylor & Francis
Entering the era of the Internet of Things (IoT) and fifth-generation (5G) mobile networks, the
demand for compact, cost-effective, and high-performance sensors and actuators is …

Micro/nano-optoeletromechanical systems

D Dragoman, M Dragoman - Progress in quantum electronics, 2001 - Elsevier
This paper reviews the state of the art of micro and nano-optoelectromechanical systems,
which in the last years have changed in many ways our common view about optical and …

Micro-opto-electro-mechanical systems technology and its impact on photonic applications

H Schenk, A Wolter, U Dauderstaedt… - Journal of Micro …, 2005 - spiedigitallibrary.org
Light and electricity are two major sources leading technology advances into the future.
Micro-opto-electro-mechanical-systems (MOEMS) devices combine these two sources in an …

Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics

AH Safavi-Naeini, D Van Thourhout, R Baets… - Optica, 2019 - opg.optica.org
Radio-frequency communication systems have long used bulk-and surface-acoustic-wave
devices supporting ultrasonic mechanical waves to manipulate and sense signals. These …

2D-materials-integrated optoelectromechanics: recent progress and future perspectives

M Peng, J Cheng, X Zheng, J Ma… - Reports on Progress in …, 2023 - iopscience.iop.org
The discovery of two-dimensional (2D) materials has gained worldwide attention owing to
their extraordinary optical, electrical, and mechanical properties. Due to their atomic layer …