Fabrication process for a magnetic tunnel junction device
G Stojakovic, RM Ranade, I Kasko, J Neutzel… - US Patent …, 2006 - Google Patents
(57) ABSTRACT A method of fabricating a magnetic tunnel junction (MTJ) device is
provided. A patterned hard mask is oxidized to form a Surface oxide thereon. An MTJ Stack …
provided. A patterned hard mask is oxidized to form a Surface oxide thereon. An MTJ Stack …
Magnetic tunnel junction device and fabrication
A magnetic tunneling junction device and fabrication method is disclosed. In a particular
embodiment, the method includes depositing a capping material on a free layer of a …
embodiment, the method includes depositing a capping material on a free layer of a …
Magnetic tunnel junction device and fabrication
X Li, SH Kang, X Zhu - US Patent 8,912,012, 2014 - Google Patents
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
Replacement conductive hard mask for multi-step magnetic tunnel junction (MTJ) etch
A multi-step etch technique for fabricating a magnetic tunnel junction (MTJ) apparatus
includes forming a first conductive hard mask on a first electrode of the MTJ apparatus for …
includes forming a first conductive hard mask on a first electrode of the MTJ apparatus for …
Magnetic tunnel junction device and fabrication
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
Method of forming a magnetic tunnel junction structure
X Li, SH Kang, X Zhu - US Patent 9,136,463, 2015 - Google Patents
US9136463B2 - Method of forming a magnetic tunnel junction structure - Google Patents
US9136463B2 - Method of forming a magnetic tunnel junction structure - Google Patents …
US9136463B2 - Method of forming a magnetic tunnel junction structure - Google Patents …
Method of forming a magnetic tunnel junction structure
X Li - US Patent 7,579,197, 2009 - Google Patents
In a particular illustrative embodiment, a method of forming a magnetic tunnel junction (MTJ)
device is disclosed that includes forming a trench in a substrate. The method further includes …
device is disclosed that includes forming a trench in a substrate. The method further includes …
Magnetic tunnel junction device and method of making same
SH Huang, KH Shen, YH Wang - US Patent 9,231,191, 2016 - Google Patents
(57) ABSTRACT A magnetic tunneljunction (MTJ) device includes a reference layer having a
surface, a tunnel insulating layer formed over the surface of the reference layer, a free layer …
surface, a tunnel insulating layer formed over the surface of the reference layer, a free layer …
Magnetic tunnel junction device with separate read and write paths
US8004881B2 - Magnetic tunnel junction device with separate read and write paths - Google
Patents US8004881B2 - Magnetic tunnel junction device with separate read and write paths …
Patents US8004881B2 - Magnetic tunnel junction device with separate read and write paths …
Magnetic tunnel junction read head devices having a tunneling barrier formed by multi-layer, multi-oxidation processes
J Sun, S Araki - US Patent 6,710,987, 2004 - Google Patents
A magnetic tunnel junction device and method for making same is provided. A first
ferromagnetic portion is provided. A barrier is provided on the first ferromagnetic portion. The …
ferromagnetic portion is provided. A barrier is provided on the first ferromagnetic portion. The …