Method of forming a magnetic tunnel junction device

X Li - US Patent 8,680,592, 2014 - Google Patents
A method of forming a magnetic tunnel junction device is disclosed that includes forming a
trench in a substrate, the trench including a first sidewall, a second sidewall, a third sidewall …

Method of forming a magnetic tunnel junction device

X Li - US Patent 8,766,384, 2014 - Google Patents
A method of forming a magnetic tunnel junction device is disclosed that includes forming a
trench in a substrate, the trench including a plurality of sidewalls and a bottom wall. The …

Method of forming a magnetic tunnel junction device

X Li - US Patent 7,781,231, 2010 - Google Patents
(57) ABSTRACT A method of manufacturing a magnetic tunnel junction device is disclosed
that includes forming a trench in a Sub strate, depositing a conductive terminal within the …

Sub-lithographic patterning of magnetic tunneling junction devices

Y Lu - US Patent 9,362,336, 2016 - Google Patents
A method for fabricating a magnetic tunnel junction (MTJ) device includes creating a recess
within a second patterning layer, in which a first patterning layer overhangs the recessed …

Magnetic tunnel junction and method for fabricating a magnetic tunnel junction

X Li, K Lee, WC Chen, Y Lu, C Park… - US Patent App. 14 …, 2015 - Google Patents
An improved magnetic tunnel junction device and methods for fabricating the improved
magnetic tunnel junction device are provided. The provided two-etch process reduces …

Etch-resistant protective coating for a magnetic tunnel junction device

Y Lu, C Park, WC Chen - US Patent 9,349,939, 2016 - Google Patents
A method of forming a magnetic tunnel junction (MTJ) device includes forming a spacer on
an exposed side portion of the MTJ device. The method further includes forming an etch …

Double magnetic tunnel junction device, formed by UVH wafer bonding

A Reznicek, VV Mehta - US Patent 11,114,607, 2021 - Google Patents
A method of manufacturing a double magnetic tunnel junction device is provided. The
method includes forming a first magnetic tunnel junction stack. The first magnetic tunnel …

Magnetic tunnel junction device and fabrication

X Li, SH Kang, X Zhu - US Patent 8,455,267, 2013 - Google Patents
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …

Magnetic tunnel junction with reduced damage

CH Diaz, RL Lee - US Patent 9,905,751, 2018 - Google Patents
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …

Magnetic tunnel junction device and fabrication

X Li, SH Kang - US Patent 9,041,131, 2015 - Google Patents
A method of forming a magnetic tunnel junction (MTJ) device includes forming a first MTJ
cap layer on a MTJ structure. The first MTJ cap layer includes a first non-nitrified metal. The …