With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as IC-compatible tanks for use in the low phase noise oscillators and highly …

Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechanical resonators with Qs> 10,000 at 1.5 GHz, are described as …

An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …

IC-compatible microelectromechanical intermediate frequency filters using integrated
resonators with Q's in the thousands to achieve filter Q's in the hundreds have been …

This chapter focuses on communications subsystem performance enhancements potentially
attainable via use of vibrating micromechanical resonator circuits in MEMS‐based …

Third order, high-Q, micromechanical bandpass filters comprised of three ratioed folded-
beam resonators coupled by flexural mode springs are demonstrated using an integrated …

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a
custom-designed single-stage zero-phase-shift sustaining amplifier together with planar …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

VHF and UHF MEMS-based vibrating micromechanical resonators equipped with new solid
dielectric (ie, filled) capacitive transducer gaps to replace previously used air gaps have …