Microelectromechanical systems (MEMS) resonators serve as frequency-selective
components in applications ranging from biology to communications. In this paper, the …

In this work a very accurate process for modeling a microdisk resonator is presented and the
dynamic behavior of the resonator is investigated. Using the minimization of the …

This paper studies the nonlinear electromechanical response of a MEMS resonator
numerically. A nonlinear continuous multi-physics model of the MEMS resonator is …

In light of recent efforts to implement micromechanical resonators with high-Q and high
frequency, an analytical model for support loss in micromechanical disk resonators has …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been developed to achieve vibrating radial contour mode polysilicon …

Nonlinearity plays an important role in the dynamics of microelectromechanical resonator.
On the one hand, presence of nonlinearity may lead to poor performance of the device. On …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

A novel microresonator operating on the principle of nonlinear modal interactions due to
autoparametric 1: 2 internal resonance is introduced. Specifically, an electrostatically …

This paper is the first which examines the nonlinear dynamical characteristics of an
imperfect microplate-based microelectromechanical system (MEMS), taking into account …