A micro-machined hydrophone with a unimorphic piezoelectric membrane was developed.
To enhance its applicability to SONAR, air backing was adopted for improved sensitivity in …

Hydrophone, serving as a part of sonar, has a significant effect on the performance of
acoustic sensors such as frequency characteristics and sensitivity, however, some limitation …

A micro-machined underwater acoustic receiver that utilizes the flexural vibration mode of a
silicon thin plate and piezoelectric transduction material was investigated. In particular, air …

We report a micro-machined hydrophone using piezoelectric gate on a field-effect transistor
(PiGoFET), where a piezoelectric body is combined directly on the gate of a FET. The …

In this paper, a novel micro electromechanical systems (MEMS) piezoelectric hydrophone
with the ability to detect the direction of the sound in two dimensions was designed and …

A mathematical model is necessary to analyze sensor performance and optimize its design.
However, most of the existing models of piezoelectric micro-machined hydrophones are …

This paper presents a micromachined hydrophone with high sensitivity and low noise
density. The hydrophone is composed of a 10by10 piezoelectric aluminum nitride (AlN) …

In contrast to the induced charge or voltage in conventional piezoelectric hydrophones,
changes in the bound surface charge density and the corresponding changes in the electric …

A new design of a MEMS bionic vector hydrophone based on piezoelectric transduction has
been proposed. The designed hydrophone has a higher sensitivity in comparison to its …

Similar to the vital performance factors, the receiving sensitivity and the bandwidth exist
interactively in the micro-electromechanical systems (MEMS)-based vector hydrophones …