AlN-on-SOI platform-based micro-machined hydrophone
J Xu, X Zhang, SN Fernando, KT Chai, Y Gu - Applied Physics Letters, 2016 - pubs.aip.org
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture
L Jia, L Shi, C Liu, Y Yao, C Sun… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density
This paper presents a micromachined hydrophone with high sensitivity and low noise
density. The hydrophone is composed of a 10by10 piezoelectric aluminum nitride (AlN) …
density. The hydrophone is composed of a 10by10 piezoelectric aluminum nitride (AlN) …
Design of the monolithic integrated array MEMS hydrophone
L Mengran, Z Guojun, S Xiaopeng, L Yuan… - IEEE Sensors …, 2015 - ieeexplore.ieee.org
Since the sensitivity and frequency band of the micro-electro-mechanical system (MEMS)
bionic vector hydrophone restrain each other, a single hydrophone can not simultaneously …
bionic vector hydrophone restrain each other, a single hydrophone can not simultaneously …
Development of cup-shaped micro-electromechanical systems-based vector hydrophone
W Xu, Y Liu, G Zhang, R Wang, C Xue… - Journal of Applied …, 2016 - pubs.aip.org
Similar to the vital performance factors, the receiving sensitivity and the bandwidth exist
interactively in the micro-electromechanical systems (MEMS)-based vector hydrophones …
interactively in the micro-electromechanical systems (MEMS)-based vector hydrophones …
A piezoelectric micromachined ultrasound transducers (pMUT) array, for wide bandwidth underwater communication applications
This paper presents an array of five aluminum nitride (AlN) based piezoelectric
micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540 …
micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540 …
Sensitivity and directivity analysis of piezoelectric ultrasonic cantilever-based mems hydrophone for underwater applications
B Abdul, VM Mastronardi, A Qualtieri, L Algieri… - Journal of Marine …, 2020 - mdpi.com
In this paper, we report on the characterization of the sensitivity and the directionality of a
novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) …
novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) …
A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure
This letter presents a high-performance scandium-doped aluminum nitride (Sc x Al 1-x N, x=
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric …
A micro-machined hydrophone employing a piezoelectric body combined on the gate of a field-effect transistor
M Sung, K Shin, W Moon - Sensors and Actuators A: Physical, 2016 - Elsevier
We report a micro-machined hydrophone using piezoelectric gate on a field-effect transistor
(PiGoFET), where a piezoelectric body is combined directly on the gate of a FET. The …
(PiGoFET), where a piezoelectric body is combined directly on the gate of a FET. The …
Low-cost, tiny-sized MEMS hydrophone sensor for water pipeline leak detection
In this paper, we present an experimental investigation of a water pipeline leak detection
system based on a low-cost, tiny-sized hydrophone sensor fabricated using the …
system based on a low-cost, tiny-sized hydrophone sensor fabricated using the …