Micromechanical" hollow-disk" ring resonators
SS Li, YW Lin, Y Xie, Z Ren… - 17th IEEE International …, 2004 - ieeexplore.ieee.org
A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …
1.156-GHz self-aligned vibrating micromechanical disk resonator
J Wang, Z Ren, CTC Nguyen - IEEE transactions on ultrasonics …, 2004 - ieeexplore.ieee.org
A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …
UHF micromechanical extensional wine-glass mode ring resonators
Y Xie, SS Li, YW Lin, Z Ren… - … Devices Meeting 2003, 2003 - ieeexplore.ieee.org
Vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-
glass mode shape to achieve lower impedance than previous UHF resonators, have been …
glass mode shape to achieve lower impedance than previous UHF resonators, have been …
High-Q UHF micromechanical radial-contour mode disk resonators
JR Clark, WT Hsu, MA Abdelmoneum… - Journal of …, 2005 - ieeexplore.ieee.org
A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …
High-Q VHF micromechanical contour-mode disk resonators
JR Clark, WT Hsu, CTC Nguyen - … Electron Devices Meeting …, 2000 - ieeexplore.ieee.org
A micromechanical, laterally vibrating disk resonator, fabricated via a technology that
combines polysilicon surface-micromachining and metal electroplating to attain submicron …
combines polysilicon surface-micromachining and metal electroplating to attain submicron …
1.52-GHz micromechanical extensional wine-glass mode ring resonators
Y Xie, SS Li, YW Lin, Z Ren… - ieee transactions on …, 2008 - ieeexplore.ieee.org
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …
Stemless wine-glass-mode disk micromechanical resonators
MA Abdelmoneum, MU Demirci… - The Sixteenth Annual …, 2003 - ieeexplore.ieee.org
Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-
intrusive suspension structure have been demonstrated in both vacuum and atmospheric …
intrusive suspension structure have been demonstrated in both vacuum and atmospheric …
Self-aligned 1.14-GHz vibrating radial-mode disk resonators
J Wang, Z Ren, CTC Nguyen - TRANSDUCERS'03. 12th …, 2003 - ieeexplore.ieee.org
A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been utilized to achieve vibrating radial-contour mode micromechanical …
its anchor (s) has been utilized to achieve vibrating radial-contour mode micromechanical …
Support loss in micromechanical disk resonators
In light of recent efforts to implement micromechanical resonators with high-Q and high
frequency, an analytical model for support loss in micromechanical disk resonators has …
frequency, an analytical model for support loss in micromechanical disk resonators has …
1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support
The first CVD nanocrystalline diamond micromechanical disk resonator with material-
mismatched stem has been demonstrated at a record frequency of 1.51 GHz with an …
mismatched stem has been demonstrated at a record frequency of 1.51 GHz with an …