Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling

P Eyben, M Xu, N Duhayon, T Clarysse… - Journal of Vacuum …, 2002 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) has been demonstrated to have …
First we present a program for the automatic generation of calibration curves and the fast …

Calibrated scanning spreading resistance microscopy profiling of carriers in III–V structures

RP Lu, KL Kavanagh, SJ Dixon-Warren… - Journal of Vacuum …, 2001 - pubs.aip.org
… The emergence of scanning spreading resistance microscopy (… atomic-force microscope
(AFM) scanning in contact mode, … The variation in the current, as the tip is scanned, should …

… profiling of carriers in a buried heterostructure multi-quantum-well laser: Calibrated scanning spreading resistance microscopy and scanning capacitance microscopy

D Ban, EH Sargent, SJ Dixon-Warren… - Journal of Vacuum …, 2002 - pubs.aip.org
… a scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy
Calibrated SSRM and SCM measurements were performed on the MQW BH laser structure, …

Access to residual carrier concentration in ZnO nanowires by calibrated scanning spreading resistance microscopy

L Wang, JM Chauveau, R Brenier, V Sallet… - Applied Physics …, 2016 - pubs.aip.org
… (c) for calibration purpose. The two horizontal lines indicate the range of SSRM resistance
for MOCVD grown ZnO NWs in this work. Their intersections with the calibration curve indicate …

Calibrated complex impedance and permittivity measurements with scanning microwave microscopy

G Gramse, M Kasper, L Fumagalli, G Gomila… - …, 2014 - iopscience.iop.org
… We present a procedure for calibrated complex impedance measurements and dielectric
quantification with scanning microwave microscopy. The calibration procedure works in situ …

Recent progress and insights in two‐dimensional carrier profiling using scanning spreading resistance microscopy

P Eyben, D Alvarez, T Clarysse, S Denis… - AIP Conference …, 2003 - pubs.aip.org
… and have been calibrated with the Spreading Resistance Probe … large dimensions of the
present calibration structures, efforts are … of scanning for the collection of a full calibration curve. …

A comprehensive model for the electrical nanocontact on germanium for scanning spreading resistance microscopy applications

A Schulze, AS Verhulst, A Nazir, T Hantschel… - Journal of Applied …, 2013 - pubs.aip.org
… regime of the calibration curve, one notices a saturation of the resistance (Figure 3). To
understand this effect, one needs to realize that SSRM measures the total resistance between tip …

Nanoscale temperature sensing of electronic devices with calibrated scanning thermal microscopy

T Swoboda, N Wainstein, S Deshmukh, Ç Köroğlu… - Nanoscale, 2023 - pubs.rsc.org
… In this work, we calibrate a thermo-resistive SThM probe … scanning the metal lines is also
evaluated under different probe and line temperatures. Our results reveal that the calibration

… profiling of carriers in terahertz quantum cascade lasers using calibrated scanning spreading resistance microscopy and scanning capacitance microscopy

RS Dhar, D Ban - Journal of Microscopy, 2013 - Wiley Online Library
… (SSRM) and scanning capacitance microscopy (SCM). … -barrier structure were calibrated
utilizing known GaAs dopant … our results the efficacy of uniting calibrated SSRM and SCM to …

Quantitative measurement of voltage contrast in scanning electron microscope images for in-line resistance inspection of wafers

M Matsui, T Odaka, H Nagaishi… - Journal of Micro …, 2010 - spiedigitallibrary.org
… defect resistance, which is quantitatively estimated from the voltage contrast formed in a
scanning electron microscopy (… calibration wafers for the voltage-contrast calibration. The contact …