… in the ON state and a capacitor in the OFF state. Therefore, … the ON-state resistance, Ron,
and OFF-state capacitance, Coff… working on a range of RF MEMS switch solutions for specific …

… constant of the material in the off-state and by the conductivity in the on-state. What eqn. (6) …
(11) is that if the switch physically moves when changing from the off-state to on-state, we …

… ages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated
… DC measurements indicate actuation voltages as low as 9 V with an on-to-off capacitance …

… The return loss of the RF MEMS capacitive in the offstate is … This means that the insertion
loss of the RF MEMS switch at … the membrane is actuated into the on-state, is shown in Fig. 5. …

… On-state and off-state are equivalent to switch between Rc and Cc. At the deep offstate, Cc
becomes smaller than its initial state because of the larger distance between the signal line …

… that a very low ON-state insertion loss and very high OFF-state isolation can be achieved. …
area improves the ON-state insertion loss, but compromises the OFF-state isolation. As a result…

… RF MEMS switches more promising. Table I compares the commercially available solid-state
switches and the RF MEMS … difference according to the ON/OFF states as shown in Fig. 4. …

… ) technology based on microelectromechanical systems (MEMS). RF MEMS provides a class
of … with the control electrodes in the MEMS switch is a capacitance in the on and off states, …

… When the fingers are disengaged, the switch is in the off state. The switch demonstrated
a capacitance ratio of only 15:1, exhibiting high dc power consumption because of thermal …

… The inductors were off-chip air-coil type with Q greater than 100 at 1.3 GHz, and were … The
measured performance shows state-of-theart response, both for frequency (900–1,600 MHz …