Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz… - Plasma Sources Science …, 2004 - iopscience.iop.org
The absolute concentrations of SiCl X (X= 0–2), SiF X (X= 1–2), SiClF, SiBr and SiO radicals
were measured in an industrial silicon gate etching reactor with various halogen gas …
被引用次数：47 相关文章

[引用][C] Influence of reactor walls on plasma chemistry and on silicon etch products densities during silicon etching processes in halogen based plasmas

G Cunge, M Kogelschatz… - … Sources Science and …, 2004 - hal.univ-grenoble-alpes.fr
Influence of reactor walls on plasma chemistry and on silicon etch products densities during
silicon etching processes in halogen based plasmas - Université Grenoble Alpes Accéder …

Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz, N Sadeghi - Plasma Sources Science and …, 2004 - elibrary.ru
The absolute concentrations of SiCl X (X= 0-2), SiF X (X= 1-2), SiClF, SiBr and SiO radicals
were measured in an industrial silicon gate etching reactor with various halogen gas …

Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz, N Sadeghi - Plasma Sources Science and …, 2004 - osti.gov
The absolute concentrations of SiCl {sub X}(X= 0-2), SiF {sub X}(X= 1-2), SiClF, SiBr and
SiO radicals were measured in an industrial silicon gate etching reactor with various …

Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz, N Sadeghi - Plasma Sources Science and …, 2004 - inis.iaea.org
[en] The absolute concentrations of SiCl X (X= 0-2), SiF X (X= 1-2), SiClF, SiBr and SiO
radicals were measured in an industrial silicon gate etching reactor with various halogen …

Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz… - Plasma Sources Science …, 2004 - ui.adsabs.harvard.edu
The absolute concentrations of SiCl X (X= 0-2), SiF X (X= 1-2), SiClF, SiBr and SiO radicals
were measured in an industrial silicon gate etching reactor with various halogen gas …

[引用][C] Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G Cunge, M Kogelschatz, N Sadeghi - Plasma Sources Science and …, 2004 - cir.nii.ac.jp
Influence of reactor walls on plasma chemistry and on silicon etch product densities during
silicon etching processes in halogen-based plasmas | CiNii Research CiNii 国立情報学研究所 …

[引用][C] Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas

G CUNGE, M KOGELSCHATZ… - … sources science & …, 2004 - pascal-francis.inist.fr
Influence of reactor walls on plasma chemistry and on silicon etch product densities during
silicon etching processes in halogen-based plasmas CNRS Inist Pascal-Francis CNRS …

[引用][C] Influence of reactor walls on plasma chemistry and on silicon etch products densities during silicon etching processes in halogen based plasmas

G Cunge, M Kogelschatz, N Sadeghi - Plasma Sources Science and …, 2004 - hal.science
Influence of reactor walls on plasma chemistry and on silicon etch products densities during
silicon etching processes in halogen based plasmas - Archive ouverte HAL Accéder …

[引用][C] Influence of reactor walls on plasma chemistry and on silicon etch products densities during silicon etching processes in halogen based plasmas

G Cunge, M Kogelschatz… - … Sources Science and …, 2004 - hal.univ-grenoble-alpes.fr
Influence of reactor walls on plasma chemistry and on silicon etch products densities during
silicon etching processes in halogen based plasmas - Université Grenoble Alpes Accéder …