Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag, A Ababneh… - Journal of …, 2010 - iopscience.iop.org
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …
被引用次数：46 相关文章

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag, E Peiner… - … , Devices and Systems, 2010 - inis.iaea.org
[en] We report on a micro-machined resonator for mass sensing applications which is based
on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) …

[引用][C] Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag… - Journal of …, 2010 - repositum.tuwien.at
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag, E Peiner… - … of Micromechanics and …, 2010 - osti.gov
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

[引用][C] Evaluation of resonating Si cantilevers sputter-deposited with AIN piezoelectric thin films for mass sensing applications

Ü SÖKMEN, A STRANZ, A WAAG… - Journal of …, 2010 - pascal-francis.inist.fr
Evaluation of resonating Si cantilevers sputter-deposited with AIN piezoelectric thin films for
mass sensing applications CNRS Inist Pascal-Francis CNRS Pascal and Francis …

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag… - Journal of …, 2010 - ui.adsabs.harvard.edu
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ü Sökmen, A Stranz, A Waag, A Ababneh, H Seidel… - 2010 - arch.neicon.ru
We report on a micro-machined resonator for mass sensing applications which is based on
a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin …

[引用][C] Evaluation of resonating Si cantilevers sputter-deposited with AIN piezoelectric thin films for mass sensing applications

Ü SÖKMEN, A STRANZ, A WAAG… - Journal of …, 2010 - Institute of Physics