[HTML][HTML] Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: A review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - mdpi.com
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.
A Iqbal, F Mohd-Yasin - Sensors (14248220), 2018 - search.ebscohost.com
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
[引用][C] Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - cir.nii.ac.jp
[PDF][PDF] Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - core.ac.uk
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
[PDF][PDF] Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - researchgate.net
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors (Basel, Switzerland), 2018 - pubmed.ncbi.nlm.nih.gov
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - search.proquest.com
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
[引用][C] Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - ui.adsabs.harvard.edu
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A
Review - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …
Review - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …
[PDF][PDF] Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - pdfs.semanticscholar.org
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.
A Iqbal, F Mohd-Yasin - Sensors (Basel, Switzerland), 2018 - europepmc.org
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …