Fabrication of narrow-gapped dual Si AFM tips by mechanically polishing-back for selective trench sidewalls protection

K Kawashima, E Makino, T Mineta - IEEJ Transactions on Sensors …, 2014 - jstage.jst.go.jp
We developed a fabrication process of narrow-gapped twin nano-tips for atomic force
microscopy (AFM) dual probes. A tetrahedral dual tip consisting of an inclined crystalline Si …
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[引用][C] Fabrication of Narrow-gapped Dual Si AFM Tips by Mechanically Polishing-back for Selective Trench Sidewalls Protection

K Kawashima, E Makino… - IEEJ Transactions on …, 2014 - ui.adsabs.harvard.edu
Fabrication of Narrow-gapped Dual Si AFM Tips by Mechanically Polishing-back for Selective
Trench Sidewalls Protection - NASA/ADS Now on home page ads icon ads Enable full ADS view …

Fabrication of Narrow-gapped Dual Si AFM Tips by Mechanically Polishing-back for Selective Trench Sidewalls Protection

K Kawashima, E Makino, T Mineta - 電気学会論文誌E (センサ …, 2014 - jlc.jst.go.jp
We developed a fabrication process of narrow-gapped twin nano-tips for atomic force
microscopy (AFM) dual probes. A tetrahedral dual tip consisting of an inclined crystalline Si …

Fabrication of Narrow-gapped Dual Si AFM Tips by Mechanically Polishing-back for Selective Trench Sidewalls Protection

K Kenta, M Eiji, M Takashi - 電気学会論文誌E (センサ・マイクロマシン部門 …, 2014 - cir.nii.ac.jp
抄録 We developed a fabrication process of narrow-gapped twin nano-tips for atomic force
microscopy (AFM) dual probes. A tetrahedral dual tip consisting of an inclined crystalline Si …

Fabrication of Narrow-gapped Dual Si AFM Tips by Mechanically Polishing-back for Selective Trench Sidewalls Protection

K Kawashima, E Makino, T Mineta - 電気学会論文誌E (センサ …, 2014 - jlc.jst.go.jp
We developed a fabrication process of narrow-gapped twin nano-tips for atomic force
microscopy (AFM) dual probes. A tetrahedral dual tip consisting of an inclined crystalline Si …