Development of a large-range atomic force microscope measuring system for optical free form surface characterization

T Guo, L Wang, J Chen, X Fu, X Hu - Measurement Science and …, 2012 - iopscience.iop.org
In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …
被引用次数：9 相关文章

Development of a large-range atomic force microscope measuring system for optical free form surface characterization

T Guo, L Wang, J Chen, X Fu, X Hu - Measurement Science and …, 2012 - inis.iaea.org
[en] In this paper, a large-range atomic force microscope (AFM) measuring system is
developed for optical free form surface characterization. Based on the self-sensing tuning …

Development of a large-range atomic force microscope measuring system for optical free form surface characterization

T Guo, L Wang, J Chen, X Fu, X Hu - Measurement Science and …, 2012 - osti.gov
In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

Development of a large-range atomic force microscope measuring system for optical free form surface characterization

T Guo, L Wang, J Chen, X Fu… - … Science and Technology, 2012 - ui.adsabs.harvard.edu
In this paper, a large-range atomic force microscope (AFM) measuring system is developed
for optical free form surface characterization. Based on the self-sensing tuning fork probe, a …

[引用][C] Development of a large-range atomic force microscope measuring system for optical free form surface characterization

T GUO, L WANG, J CHEN, X FU… - Measurement science & …, 2012 - Institute of Physics