Cantilever based MEMS for multiple mass sensing

Research in Microelectronics and Electronics, 2005 …, 2005 - ieeexplore.ieee.org
A cantilever based micro electro mechanical system (MEMS) for mass detection is
presented. The sensor for multiple detections is composed by several cantilevers in an array …
被引用次数：19 相关文章
[PDF] academia.edu

[PDF][PDF] CANTILEVER BASED MEMS FOR MULTIPLE MASS SENSING

M Villarroya, J Verd, J Teva, G Abadal, F Pérez… - academia.edu
ABSTRACT A cantilever based Micro Electro Mechanical System (MEMS) for mass detection
is presented. The sensor for multiple detections is composed by several cantilevers …

[引用][C] Cantilever based MEMS for multiple mass sensing

M Villarroya, J Verd, J Teva, G Abadal… - Phd research in …, 2005 - portalrecerca.uab.cat
Cantilever based MEMS for multiple mass sensing — Universitat Autònoma de Barcelona
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[PDF] researchgate.net

[PDF][PDF] CANTILEVER BASED MEMS FOR MULTIPLE MASS SENSING

M Villarroya, J Verd, J Teva, G Abadal, F Pérez… - researchgate.net
ABSTRACT A cantilever based Micro Electro Mechanical System (MEMS) for mass detection
is presented. The sensor for multiple detections is composed by several cantilevers …
[PDF] academia.edu

[PDF][PDF] CANTILEVER BASED MEMS FOR MULTIPLE MASS SENSING

M Villarroya, J Verd, J Teva, G Abadal, F Pérez… - academia.edu
ABSTRACT A cantilever based Micro Electro Mechanical System (MEMS) for mass detection
is presented. The sensor for multiple detections is composed by several cantilevers …
[PDF] researchgate.net

[PDF][PDF] CANTILEVER BASED MEMS FOR MULTIPLE MASS SENSING

M Villarroya, J Verd, J Teva, G Abadal, F Pérez… - researchgate.net
ABSTRACT A cantilever based Micro Electro Mechanical System (MEMS) for mass detection
is presented. The sensor for multiple detections is composed by several cantilevers …