A novel white light interference based AFM head

W Yang, X Liu, W Lu, N Yu, L Chen… - Journal of Lightwave …, 2016 - ieeexplore.ieee.org
A novel atomic force microscope (AFM) head based on white light interference (WLI) is
developed for nanoscale surface measurement. In this head, instead of an optical beam …

[引用][C] A Novel White Light Interference Based AFM Head

W Yang, X Yang, W Lu, N Yu, L Chen… - Journal of …, 2017 - ui.adsabs.harvard.edu
A Novel White Light Interference Based AFM Head - NASA/ADS Now on home page ads icon
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A Novel White Light Interference Based AFM Head

W Yang, X Liu, W Lu, N Yu, L Chen, L Zhou… - Journal of Lightwave …, 2017 - opg.optica.org
A novel atomic force microscope (AFM) head based on white light interference (WLI) is
developed for nanoscale surface measurement. In this head, instead of an optical beam …