[HTML][HTML] Metrological atomic force microscope for calibrating nano-scale step height standards

S Wang - Measurement: Sensors, 2021 - Elsevier
In this paper, we described a metrological AFM in order to calibrate step height standards
used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement …

Metrological atomic force microscope for calibrating nano-scale step height standards

S Wang - Measurement: Sensors, 2021 - ui.adsabs.harvard.edu
In this paper, we described a metrological AFM in order to calibrate step height standards
used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement …