AFM probe tips using heavily boron-doped silicon cantilevers realized in a< 110> bulk silicon wafer

IJ Cho, EC Park, E Yoon - Digest of Papers Microprocesses …, 2000 - ieeexplore.ieee.org
In this paper, we report a new method of fabricating AFM (Atomic Force Microscope) probe
tips at low cost. Most of previous AFM probe tips have been made of SOI wafers using back …
被引用次数：4 相关文章

[引用][C] AFM probe tips using heavily boron-doped silicon cantilevers-Realized in a (110) bulk silicon wafer

E Yoon - International Microprocesses and Nanotechnology …, 2000 - koasas.kaist.ac.kr
DSpace at KOASAS: AFM probe tips using heavily boron-doped silicon cantilevers - Realized in
a (110) bulk silicon wafer KOASAS menu About KOASAS KAIST Library 검색 Advanced Search …

AFM probe tips using heavily boron-doped silicon cantilevers realized in a< 110> bulk silicon wafer

IJ Cho, EC Park, E Yoon - … Conference, MNC 2000, 2000 - yonsei.elsevierpure.com
In this paper, we report a new method of fabricating AFM (Atomic Force Microscope) probe
tips at low cost. Most of previous AFM probe tips have been made of SOI wafers using back …