Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

A Ahmed, A Khlifi, S Pandit, R Patkar, A Joshi… - Microsystem …, 2020 - Springer
Abstract Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite
based single axis acceleration sensor is presented. The entire sensor made of SU-8 …
被引用次数：12 相关文章

Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

A Ahmed, A Khlifi, S Pandit, R Patkar, A Joshi… - Microsystem …, 2020 - dl.acm.org
Abstract Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite
based single axis acceleration sensor is presented. The entire sensor made of SU-8 …

Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

A Ahmed, A Khlifi, S Pandit, R Patkar… - Microsystem …, 2020 - search.proquest.com
Abstract Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite
based single axis acceleration sensor is presented. The entire sensor made of SU-8 …

[引用][C] Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

A Ahmed, A Khlifi, S Pandit, R Patkar, A Joshi… - Microsystem …, 2020 - cir.nii.ac.jp
Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer
MEMS acceleration sensor | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ …