Rapid characterization of nano-scale structures in large-scale ultra-precision surfaces

W Yang, X Liu, C Hu, W Lu, C Chen, Z Yao… - Optics and Lasers in …, 2020 - Elsevier
Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …
被引用次数：13 相关文章

Rapid characterization of nano-scale structures in large-scale ultra-precision surfaces

W Yang, X Liu, C Hu, W Lu, C Chen… - Optics and Lasers in …, 2020 - ui.adsabs.harvard.edu
Characterizations of nano-scale structures using conventional stylus profilometer and optical
microscopy are respectively restricted by tip radius and diffraction limit. Atomic force …