System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M Villarroya, J Verd, J Teva, G Abadal, E Forsen… - Sensors and Actuators A …, 2006 - Elsevier
In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …
被引用次数：66 相关文章

[引用][C] System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M Villarroya, J Verd, J Teva, G Abadal… - Sensors and Actuators …, 2006 - orbit.dtu.dk
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System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M Villarroya, J Verd, J Teva, G Abadal, E Forsen… - Sensors & Actuators: A …, 2006 - infona.pl
In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M Villarroya, J Verd, J Teva, G Abadal… - … and Actuators A …, 2006 - ui.adsabs.harvard.edu
In this work, we present an on chip microelectromechanical system based on an array of
cantilevers for mass detection. The sensor transducer, using polysilicon as structural layer …

[引用][C] System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M VILLARROYA, J VERD, J TEVA, G ABADAL… - Sensors and actuators …, 2006 - Elsevier