In situ synthesis of Si3N4 in the Na2SiF6–N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition

AL Leal-Cruz, MI Pech-Canul - Solid State Ionics, 2007 - Elsevier
The kinetics of decomposition of Na2SiF6 in nitrogen to in situ synthesize Si3N4 was
investigated. First, an optimization of the following parameters for the thermal decomposition …
被引用次数：19 相关文章

In situ synthesis of Si3N4 in the Na2SiF6-N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition

AL Leal-Cruz, MI Pech-Canul - Solid State Ionics, 2007 - investigadores.unison.mx
The kinetics of decomposition of Na2SiF6 in nitrogen to in situ synthesize Si3N4 was
investigated. First, an optimization of the following parameters for the thermal decomposition …

In situ synthesis of Si3N4 in the Na2SiF6–N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition

AL Leal-Cruz, MI Pech-Canul - Solid State Ionics, 2007 - infona.pl
The kinetics of decomposition of Na 2 SiF 6 in nitrogen to in situ synthesize Si 3 N 4 was
investigated. First, an optimization of the following parameters for the thermal decomposition …

In situ synthesis of Si3N4 in the Na2SiF6-N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition: Kinetics and mechanism of solid-precursor …

AL Leal-Cruz, MI Pech-Canul - Solid State Ionics, 2007 - investigadores.unison.mx
The kinetics of decomposition of Na 2 SiF 6 in nitrogen to in situ synthesize Si 3 N 4 was
investigated. First, an optimization of the following parameters for the thermal decomposition …

[引用][C] In situ synthesis of Si3N4 in the Na2SiF6-N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition

AL LEAL-CRUZ, MI PECH-CANUL - Solid state ionics, 2007 - Elsevier