[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
[引用][C] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
RMR Pinto, V Gund, C Calaza, KK Nagaraja… - Microelectronic …, 2022 - cir.nii.ac.jp
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques | CiNii
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …
[PDF][PDF] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
RMR Pinto, V Gund, C Calaza… - Microelectronic …, 2022 - researchgate.net
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
RMR Pinto, V Gund, C Calaza… - Microelectronic …, 2022 - impressions.manipal.edu
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
Piezoelectric aluminum nitride thin-films:: A review of wet and dry etching techniques
RMR Pinto, V Gund, C Calaza, KK Nagaraja… - 2022 - dl.acm.org
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …