Statistical feedback control of a plasma etch process
IEEE Transactions on Semiconductor Manufacturing, 1994 - ieeexplore.ieee.org
This paper presents the methodology developed for the automatic feedback control of a
silicon nitride plasma etch process. The methodology provides an augmented level of …
silicon nitride plasma etch process. The methodology provides an augmented level of …
[引用][C] Statistical feedback control of a plasma etch process
PK MOZUMDER, GG BARNA - IEEE transactions on …, 1994 - pascal-francis.inist.fr
Statistical feedback control of a plasma etch process CNRS Inist Pascal-Francis CNRS
Pascal and Francis Bibliographic Databases Simple search Advanced search Search by …
Pascal and Francis Bibliographic Databases Simple search Advanced search Search by …
[PDF][PDF] Statistical Feedback Control of a Plasma Etch Process
PK Mozumder, GG Barna - IEEE TRANSACTIONS ON …, 1994 - tarjomefa.com
This paper presents the methodology developed for the automatic feedback control of a
silicon nitride plasma etch process. The methodology provides an augmented level of …
silicon nitride plasma etch process. The methodology provides an augmented level of …
[PDF][PDF] Statistical Feedback Control of a Plasma Etch Process
PK Mozumder, GG Barna - IEEE TRANSACTIONS ON …, 1994 - tarjomefa.com
This paper presents the methodology developed for the automatic feedback control of a
silicon nitride plasma etch process. The methodology provides an augmented level of …
silicon nitride plasma etch process. The methodology provides an augmented level of …
[PDF][PDF] Statistical Feedback Control of a Plasma Etch Process
PK Mozumder, GG Barna - IEEE TRANSACTIONS ON …, 1994 - tarjomefa.com
This paper presents the methodology developed for the automatic feedback control of a
silicon nitride plasma etch process. The methodology provides an augmented level of …
silicon nitride plasma etch process. The methodology provides an augmented level of …