Investigation of ScAlN for piezoelectric and ferroelectric applications
R Petrich, H Bartsch, K Tonisch… - … & Exhibition (EMPC), 2019 - ieeexplore.ieee.org
Sc_XAl_-XN is a promising material to expand the application range of nitride materials,
since scandium increases the piezoelectric constants while retaining the crystalline wurtzite …
since scandium increases the piezoelectric constants while retaining the crystalline wurtzite …
Investigation of ScAlN for piezoelectric and ferroelectric applications
R Petrich, H Bartsch, K Tonisch, K Jaekel, S Barth… - 2019 - publica.fraunhofer.de
SCXAL1-XN is a promising material to expand the application range of nitride materials,
since scandium increases the piezoelectric constants while retaining the crystalline wurtzite …
since scandium increases the piezoelectric constants while retaining the crystalline wurtzite …